Keyword: Magnetron sputtering
2 results found.
Research Article
Study on Preparing β-Ga2O3 Films with Temperature-Controlled Buffer Layer by RF Magnetron Sputtering
Applied Functional Materials, 2(3), September 2022, 24-29, https://doi.org/10.35745/afm2022v02.03.0003
Research Article
Applied Functional Materials, 2(2), June 2022, 26-34, https://doi.org/10.35745/afm2022v02.02.0005
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